Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1509844
DC FieldValue
dc.titleMorphological and structural analyses of plasma-induced damage to n-type GaN
dc.contributor.authorChoi, H.W.
dc.contributor.authorChua, S.J.
dc.contributor.authorTripathy, S.
dc.date.accessioned2014-10-07T04:32:43Z
dc.date.available2014-10-07T04:32:43Z
dc.date.issued2002-10-15
dc.identifier.citationChoi, H.W., Chua, S.J., Tripathy, S. (2002-10-15). Morphological and structural analyses of plasma-induced damage to n-type GaN. Journal of Applied Physics 92 (8) : 4381-4385. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1509844
dc.identifier.issn00218979
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82721
dc.description.abstractPlasma-induced damage to n-type GaN has been studied by atomic force microscopy and Raman spectroscopy. It was found that the extent of surface roughening is largely dependent on the surface defect density, since preferential sputtering at these sites takes place. Several Raman defect modes have emerged from the plasma-damaged samples, and have been compared to the defect modes observed from ion-implanted GaN. The defect peaks centered at 300 and 360cm -1 have been assigned to disorder-activated Raman scattering modes, while the 453 and 639cm -1 peaks have been attributed to vacancy scattering. It has also been demonstrated that structural damage can be annealed out at 900 °C for 60 s in flowing N 2. © 2002 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.1509844
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1063/1.1509844
dc.description.sourcetitleJournal of Applied Physics
dc.description.volume92
dc.description.issue8
dc.description.page4381-4385
dc.description.codenJAPIA
dc.identifier.isiut000178318000031
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

13
checked on Apr 9, 2021

WEB OF SCIENCETM
Citations

13
checked on Apr 9, 2021

Page view(s)

49
checked on Apr 12, 2021

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.