Please use this identifier to cite or link to this item: https://doi.org/10.1109/LPT.2006.873959
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dc.titleMOEMS variable optical attenuators using rotary comb drive actuators
dc.contributor.authorYeh, J.A.
dc.contributor.authorJiang, S.-S.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:32:41Z
dc.date.available2014-10-07T04:32:41Z
dc.date.issued2006-05-15
dc.identifier.citationYeh, J.A., Jiang, S.-S., Lee, C. (2006-05-15). MOEMS variable optical attenuators using rotary comb drive actuators. IEEE Photonics Technology Letters 18 (10) : 1170-1172. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2006.873959
dc.identifier.issn10411135
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82718
dc.description.abstractWe propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2 × 4.7 mm2 only. © 2006 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LPT.2006.873959
dc.sourceScopus
dc.subjectMicrooptoelectromechanical systems (MOEMS)
dc.subjectRotary comb drive
dc.subjectVariable optical attenuators (VOAs)
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/LPT.2006.873959
dc.description.sourcetitleIEEE Photonics Technology Letters
dc.description.volume18
dc.description.issue10
dc.description.page1170-1172
dc.description.codenIPTLE
dc.identifier.isiut000238708300058
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