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https://doi.org/10.1109/LPT.2006.873959
| Title: | MOEMS variable optical attenuators using rotary comb drive actuators | Authors: | Yeh, J.A. Jiang, S.-S. Lee, C. |
Keywords: | Microoptoelectromechanical systems (MOEMS) Rotary comb drive Variable optical attenuators (VOAs) |
Issue Date: | 15-May-2006 | Citation: | Yeh, J.A., Jiang, S.-S., Lee, C. (2006-05-15). MOEMS variable optical attenuators using rotary comb drive actuators. IEEE Photonics Technology Letters 18 (10) : 1170-1172. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2006.873959 | Abstract: | We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2 × 4.7 mm2 only. © 2006 IEEE. | Source Title: | IEEE Photonics Technology Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/82718 | ISSN: | 10411135 | DOI: | 10.1109/LPT.2006.873959 |
| Appears in Collections: | Staff Publications |
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