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|Title:||MOEMS variable optical attenuators using rotary comb drive actuators||Authors:||Yeh, J.A.
|Keywords:||Microoptoelectromechanical systems (MOEMS)
Rotary comb drive
Variable optical attenuators (VOAs)
|Issue Date:||15-May-2006||Citation:||Yeh, J.A., Jiang, S.-S., Lee, C. (2006-05-15). MOEMS variable optical attenuators using rotary comb drive actuators. IEEE Photonics Technology Letters 18 (10) : 1170-1172. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2006.873959||Abstract:||We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2 × 4.7 mm2 only. © 2006 IEEE.||Source Title:||IEEE Photonics Technology Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/82718||ISSN:||10411135||DOI:||10.1109/LPT.2006.873959|
|Appears in Collections:||Staff Publications|
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