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Title: Microstructural and photoluminescence studies of germanium nanocrystals in amorphous silicon oxide films
Authors: Choi, W.K. 
Ho, Y.W.
Ng, S.P.
Ng, V. 
Issue Date: 15-Feb-2001
Citation: Choi, W.K., Ho, Y.W., Ng, S.P., Ng, V. (2001-02-15). Microstructural and photoluminescence studies of germanium nanocrystals in amorphous silicon oxide films. Journal of Applied Physics 89 (4) : 2168-2172. ScholarBank@NUS Repository.
Abstract: Ge nanocrystal growth in amorphous silicon oxide film was studied using the transmission electron microscopy and x-ray photoelectron spectroscopy techniques. The as-sputtered sample contained mainly GeO2 and Ge suboxides. GeO2 and/or suboxides dissociate when rapid thermal annealed and provide Ge for nanocrystal formation. Nanocrystals of similar size (∼60 Å in diameter) were obtained when annealed at 800̊C. Nanocrystals with diameters of 200-280 Å consisting of multiple twin structures near the Si-SiO2 interface were observed when annealed at 1000°C. The [win structure was attributed to the enhanced diffusion of Ge at 1000°C and the short annealing time. Our photoluminescence (PL) results show that the best PL response was obtained with samples that exhibit uniform nanocrystal size. © 2001 American Institute of Physics.
Source Title: Journal of Applied Physics
ISSN: 00218979
DOI: 10.1063/1.1342026
Appears in Collections:Staff Publications

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