Please use this identifier to cite or link to this item: https://doi.org/10.1109/LED.2009.2020613
DC FieldValue
dc.titleCubic-structured HfO2 with optimized doping of lanthanum for higher dielectric constant
dc.contributor.authorHe, W.
dc.contributor.authorZhang, L.
dc.contributor.authorChan, D.S.H.
dc.contributor.authorCho, B.-J.
dc.date.accessioned2014-10-07T04:25:31Z
dc.date.available2014-10-07T04:25:31Z
dc.date.issued2009
dc.identifier.citationHe, W., Zhang, L., Chan, D.S.H., Cho, B.-J. (2009). Cubic-structured HfO2 with optimized doping of lanthanum for higher dielectric constant. IEEE Electron Device Letters 30 (6) : 623-625. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2020613
dc.identifier.issn07413106
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82111
dc.description.abstractIt is demonstrated that HfO2 films can have much higher dielectric-constant values than the usual reported value of 20-24 by optimized incorporation of lanthanum element and crystallization to cubic structure. When HfO2 with 8% La is crystallized into cubic structure, the film exhibits the κ value of ∼38 which is the highest among ever reported HfO2-based high-κ dielectrics. The increased value of HfO2 with 8% La enables the leakage current to be reduced more than one order of magnitude lower, compared to amorphous-phase HfO2 under the same electric field. The dependence of film thickness and annealing temperature on the cubic crystallization is also reported. © 2009 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LED.2009.2020613
dc.sourceScopus
dc.subjectCrystallization
dc.subjectCubic structure
dc.subjectHafnium oxide
dc.subjectHigh-κ dielectric
dc.subjectLanthanum oxide
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/LED.2009.2020613
dc.description.sourcetitleIEEE Electron Device Letters
dc.description.volume30
dc.description.issue6
dc.description.page623-625
dc.description.codenEDLED
dc.identifier.isiut000266409200014
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

34
checked on Nov 13, 2019

WEB OF SCIENCETM
Citations

31
checked on Nov 6, 2019

Page view(s)

35
checked on Oct 27, 2019

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.