Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2012.2196497
DC FieldValue
dc.titleA two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
dc.contributor.authorKoh, K.H.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:23:16Z
dc.date.available2014-10-07T04:23:16Z
dc.date.issued2012
dc.identifier.citationKoh, K.H., Lee, C. (2012). A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage. Journal of Microelectromechanical Systems 21 (5) : 1124-1135. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2012.2196497
dc.identifier.issn10577157
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/81921
dc.description.abstractThis paper presents the design, fabrication, and characterization of a novel CMOS-compatible 2-D MEMS scanning mirror based on hybrid actuation mechanisms. Both electrothermal and electromagnetic (EM) actuations have been integrated in the same device for slow and fast scanning purposes, respectively. The added advantage of a CMOS-compatible fabrication process allows our device to be monolithically integrated with CMOS integrated circuits. Optical deflection angles of $\pm 1.5° for a 74-Hz vertical scan at 12 mW by electrothermal actuation and$\pm 10° for a horizontal scan frequency of 202 Hz at 1.26 mA and 1 V ac by EM actuation are reported. Our unique design of utilizing both electrothermal and EM actuation mechanisms is the first demonstration of such hybrid-driven CMOS-compatible MEMS mirror. Various Lissajous patterns have been demonstrated at low-power biasing condition, making our proposed hybrid actuation design approach suitable for mobile 2-D raster scanning applications powered by batteries with limited capacity. © 1992-2012 IEEE.
dc.sourceScopus
dc.subjectCMOS compatible
dc.subjecthybrid actuation
dc.subjectmicroelectromechanical systems (MEMS)
dc.subjectmirror
dc.subjectoptical MEMS
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/JMEMS.2012.2196497
dc.description.sourcetitleJournal of Microelectromechanical Systems
dc.description.volume21
dc.description.issue5
dc.description.page1124-1135
dc.description.codenJMIYE
dc.identifier.isiut000309731400016
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