Please use this identifier to cite or link to this item:
|Title:||A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects||Authors:||Koh, K.H.
|Keywords:||Microelectromechanical systems (MEMS)
optical microelectromechanical systems
variable optical attenuator
|Issue Date:||Dec-2010||Citation:||Koh, K.H., Lee, C., Kobayashi, T. (2010-12). A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects. Journal of Microelectromechanical Systems 19 (6) : 1370-1379. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2010.2076785||Abstract:||A gold-coated silicon mirror (5 mm × 5 mm) actuated by piezoelectric Pb (Zr,Ti) O3 (PZT) cantilever beams has been investigated for variable optical attenuator applications. The device is micromachined from a SOI substrate with a 5-μ m-thick Si device layer, with multilayers of Pt/Ti/PZT/Pt/Ti deposited as electrode materials. A large Si mirror plate and 1 × 10 arrayed PZT cantilevers arranged in parallel are formed after the release process. The ten cantilevers are designed to be electrically isolated from one another. A dual-core fiber collimator is aligned perpendicularly to the mirror in a 3-D light attenuation arrangement. Thus, three modes of attenuation mechanisms were investigated based on rotational and translational effects. A dynamic attenuation range of 40 dB is achieved at 1 V and 1.8 V for bending and torsional mode, respectively. © 2010 IEEE.||Source Title:||Journal of Microelectromechanical Systems||URI:||http://scholarbank.nus.edu.sg/handle/10635/81902||ISSN:||10577157||DOI:||10.1109/JMEMS.2010.2076785|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 30, 2020
WEB OF SCIENCETM
checked on Jun 22, 2020
checked on Jun 28, 2020
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.