Please use this identifier to cite or link to this item: https://doi.org/10.1109/LED.2002.802602
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dc.titleA high performance MIM capacitor using HfO 2 dielectrics
dc.contributor.authorHu, H.
dc.contributor.authorZhu, C.
dc.contributor.authorLu, Y.F.
dc.contributor.authorLi, M.F.
dc.contributor.authorCho, B.J.
dc.contributor.authorChoi, W.K.
dc.date.accessioned2014-10-07T04:22:42Z
dc.date.available2014-10-07T04:22:42Z
dc.date.issued2002-09
dc.identifier.citationHu, H., Zhu, C., Lu, Y.F., Li, M.F., Cho, B.J., Choi, W.K. (2002-09). A high performance MIM capacitor using HfO 2 dielectrics. IEEE Electron Device Letters 23 (9) : 514-516. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2002.802602
dc.identifier.issn07413106
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/81872
dc.description.abstractMetal-insulator-metal (MIM) capacitors with a 56-nm4hick HfO 2 high-κ dielectric film have been fabricated and demonstrated for the first of time with a low thermal budget (∼200 °C). Voltage linearity, temperature coefficients of capacitance, and electrical properties are all characterized. The results show that the HfO 2 MIM capacitor can provide a higher capacitance density than Si 3N 4 MIM capacitor while still maintaining comparable voltage and temperature coefficients of capacitance. In addition, a low leakage current of 2 × 10 -9 A/cm 2 at 3 V is achieved. All of these make the HfO 2 MIM capacitor to be very suitable for use in silicon RF and mixed signal IC applications.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LED.2002.802602
dc.sourceScopus
dc.subjectHigh-κ
dc.subjectMIM capacitor
dc.subjectTemperature coefficient
dc.subjectThin-film devices
dc.subjectVoltage linearity
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/LED.2002.802602
dc.description.sourcetitleIEEE Electron Device Letters
dc.description.volume23
dc.description.issue9
dc.description.page514-516
dc.description.codenEDLED
dc.identifier.isiut000177748500004
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