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|Title:||High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability||Authors:||Tao, J.M.
|Issue Date:||1996||Citation:||Tao, J.M.,Chim, W.K.,Chan, D.S.H.,Phang, J.C.H.,Liu, Y.Y. (1996). High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability. Annual Proceedings - Reliability Physics (Symposium) : 360-365. ScholarBank@NUS Repository.||Abstract:||A new spectroscopic photon emission microscope system (SPEMS) with high-sensitivity and continuous wavelength spectroscopic capability is presented. With the specially-designed light collection and transmission optics, high-resolution spectral characteristics can be acquired from very low-level light emissions. Two new wavelength parameters have been introduced to describe the bias-dependent spectral variation. The potential use of these two parameters as well as the spectral characteristics to identify failure mechanisms is also discussed.||Source Title:||Annual Proceedings - Reliability Physics (Symposium)||URI:||http://scholarbank.nus.edu.sg/handle/10635/81456||ISSN:||00999512|
|Appears in Collections:||Staff Publications|
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