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https://scholarbank.nus.edu.sg/handle/10635/81455
| Title: | High-order terminal iterative learning control scheme | Authors: | Chen, Yangquan Xu, Jian-Xin Wen, Changyun |
Issue Date: | 1997 | Citation: | Chen, Yangquan,Xu, Jian-Xin,Wen, Changyun (1997). High-order terminal iterative learning control scheme. Proceedings of the IEEE Conference on Decision and Control 4 : 3771-3772. ScholarBank@NUS Repository. | Abstract: | A high-order terminal iterative learning control (ILC) scheme is proposed where only the terminal output tracking error instead of the entire output trajectory tracking error is used to update the control profile. A convergence condition is obtained for a class of uncertain discrete-time time-varying linear systems. An application example is presented, by simulation, for a rapid thermal processing chemical vapor deposition (RTPCVD) thickness control problem in wafer fab industry. | Source Title: | Proceedings of the IEEE Conference on Decision and Control | URI: | http://scholarbank.nus.edu.sg/handle/10635/81455 | ISSN: | 01912216 |
| Appears in Collections: | Staff Publications |
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