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https://scholarbank.nus.edu.sg/handle/10635/81225
DC Field | Value | |
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dc.title | Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films | |
dc.contributor.author | Choi, W.K. | |
dc.contributor.author | Bera, L.K. | |
dc.contributor.author | Chen, J.H. | |
dc.contributor.author | Feng, W. | |
dc.contributor.author | Pey, K.L. | |
dc.contributor.author | Yoong, H. | |
dc.contributor.author | Mi, J. | |
dc.contributor.author | Zhang, F. | |
dc.contributor.author | Yang, C.Y. | |
dc.date.accessioned | 2014-10-07T03:05:59Z | |
dc.date.available | 2014-10-07T03:05:59Z | |
dc.date.issued | 2000-06-01 | |
dc.identifier.citation | Choi, W.K.,Bera, L.K.,Chen, J.H.,Feng, W.,Pey, K.L.,Yoong, H.,Mi, J.,Zhang, F.,Yang, C.Y. (2000-06-01). Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 75 (2-3) : 184-186. ScholarBank@NUS Repository. | |
dc.identifier.issn | 09215107 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/81225 | |
dc.description.abstract | The properties of as-prepared and rapidly thermally oxidized Si1-x-yGexCy alloy films have been examined using infrared, X-ray diffraction, and Raman techniques. The structural properties of the oxidized Si1-x-yGexCy film depend on the type of strain of the as-prepared film. For compressive or fully compensated films, the oxidation process drastically reduces the carbon content such that the oxidized film compositions resemble that of Si1-xGex films. For tensile films, two broad layers co-exist in the oxidized films, one with a carbon content higher and the other lower than that required for full strain compensation. © 2000 Elsevier Science S.A. All rights reserved. | |
dc.source | Scopus | |
dc.subject | Raman spectroscopy | |
dc.subject | Rapid thermally oxidized film | |
dc.subject | Silicon-germanium-carbon alloy films | |
dc.subject | X-ray diffraction spectroscopy | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL ENGINEERING | |
dc.description.sourcetitle | Materials Science and Engineering B: Solid-State Materials for Advanced Technology | |
dc.description.volume | 75 | |
dc.description.issue | 2-3 | |
dc.description.page | 184-186 | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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