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|Title:||Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films||Authors:||Choi, W.K.
Rapid thermally oxidized film
Silicon-germanium-carbon alloy films
X-ray diffraction spectroscopy
|Issue Date:||1-Jun-2000||Citation:||Choi, W.K.,Bera, L.K.,Chen, J.H.,Feng, W.,Pey, K.L.,Yoong, H.,Mi, J.,Zhang, F.,Yang, C.Y. (2000-06-01). Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 75 (2-3) : 184-186. ScholarBank@NUS Repository.||Abstract:||The properties of as-prepared and rapidly thermally oxidized Si1-x-yGexCy alloy films have been examined using infrared, X-ray diffraction, and Raman techniques. The structural properties of the oxidized Si1-x-yGexCy film depend on the type of strain of the as-prepared film. For compressive or fully compensated films, the oxidation process drastically reduces the carbon content such that the oxidized film compositions resemble that of Si1-xGex films. For tensile films, two broad layers co-exist in the oxidized films, one with a carbon content higher and the other lower than that required for full strain compensation. © 2000 Elsevier Science S.A. All rights reserved.||Source Title:||Materials Science and Engineering B: Solid-State Materials for Advanced Technology||URI:||http://scholarbank.nus.edu.sg/handle/10635/81225||ISSN:||09215107|
|Appears in Collections:||Staff Publications|
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