Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/81204
DC FieldValue
dc.titleSome characteristics of the zero-temperature-coefficient capacitance of an MOS capacitor in accumulation
dc.contributor.authorLing, C.H.
dc.date.accessioned2014-10-07T03:05:46Z
dc.date.available2014-10-07T03:05:46Z
dc.date.issued1991-05
dc.identifier.citationLing, C.H. (1991-05). Some characteristics of the zero-temperature-coefficient capacitance of an MOS capacitor in accumulation. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 30 (5) : 917-920. ScholarBank@NUS Repository.
dc.identifier.issn00214922
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/81204
dc.description.abstractTheoretical consideration shows that the silicon component of the MOS capacitor exhibits a zero temperature coefficient of capacitance for a silicon surface biased in accumulation. A unique surface potential, which can be expressed in terms of material properties, exists at which the surface capacitance becomes independent of temperature. Capacitance-voltage plots for temperatures within 50°C of room temperature provide experimental evidence in support of the theory. A gate bias Vx corresponding to this unique surface potential has been observed. However, a slight broadening of Vx into a small spot extending some 20 mV generally results, and has been shown to be due to the presence of the gate oxide capacitance. Vx is relatively constant over the range of signal frequencies, 10-100 kHz, but varies substantially at higher frequencies. Vx also shows a linear dependence on the gate oxide thickness decreasing at the rate of approximately 1 V/2000 A.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.sourcetitleJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
dc.description.volume30
dc.description.issue5
dc.description.page917-920
dc.description.codenJAPND
dc.identifier.isiutNOT_IN_WOS
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Page view(s)

53
checked on Mar 29, 2020

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.