Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/81130
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dc.titleScanning electron microscope design for quantitative multicontrast
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-10-07T03:04:59Z
dc.date.available2014-10-07T03:04:59Z
dc.date.issued1996-03
dc.identifier.citationKhursheed, A. (1996-03). Scanning electron microscope design for quantitative multicontrast. Scanning 18 (2) : 81-91. ScholarBank@NUS Repository.
dc.identifier.issn01610457
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/81130
dc.description.abstractConceptual designs of scanning electron microscopes (SEMs) using a time- of-flight electron spectrometer are presented. The procedure for making quantitative measurements with such SEMs is shown to be much simpler and versatile than using conventional SEMs. SEMs which use an electron time-of- flight spectrometer are able to operate as multicontrast analytical probes, capable of simultaneously quantifying surface topography, voltage, and material type. In addition, it is demonstrated that these SEMs can be designed to have high spatial resolution, good signal-to-noise characteristics, and to be of compact table-top size.
dc.sourceScopus
dc.subjectquantitative multicontrast
dc.subjectscanning electron microscopy
dc.typeArticle
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.sourcetitleScanning
dc.description.volume18
dc.description.issue2
dc.description.page81-91
dc.description.codenSCNND
dc.identifier.isiutNOT_IN_WOS
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