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Title: Measurement of the current transient in Ta2O5 films
Authors: Sundaram, K.
Choi, W.K. 
Ling, C.H. 
Issue Date: 10-Aug-1993
Citation: Sundaram, K.,Choi, W.K.,Ling, C.H. (1993-08-10). Measurement of the current transient in Ta2O5 films. Thin Solid Films 230 (2) : 95-98. ScholarBank@NUS Repository.
Abstract: Current vs. time (I-t) measurements were performed on Ta2O5-based devices. Charge build-up at the Ta2O5/SiO2 interface was used to explain the transient. The interfacial charge density was calculated from the I-t curve and the maximum was found to be 398 nC cm-2 and 317 nC cm-2 for Al/Ta2O5/Si and Al/Ta2O5/SiO2/Si capacitors respectively. The value for MTOS was comparable with the value obtained by quasi-static measurements. © 1993.
Source Title: Thin Solid Films
ISSN: 00406090
Appears in Collections:Staff Publications

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