Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/80588
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dc.titleImproving the speed of scanning electron microscope deflection systems
dc.contributor.authorLee, K.W.
dc.contributor.authorThong, J.T.L.
dc.date.accessioned2014-10-07T02:59:10Z
dc.date.available2014-10-07T02:59:10Z
dc.date.issued1999-11
dc.identifier.citationLee, K.W., Thong, J.T.L. (1999-11). Improving the speed of scanning electron microscope deflection systems. Measurement Science and Technology 10 (11) : 1070-1074. ScholarBank@NUS Repository.
dc.identifier.issn09570233
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/80588
dc.description.abstractA simple technique to characterize the response of a SEM deflection system is described. By measuring the delay in the SEM video signal as the primary beam is deflected and swept over a knife-edge, the transient deflection response can be mapped out. The transfer function of the beam deflection is then approximated by exponential functions and appropriate analogue filters are designed to pre-emphasise the deflection coil drive signal in order to increase the deflection speed. This technique is used to decrease the deflection response time from typically ∼6 μs to ∼0.5 μs, thereby allowing the implementation of non-raster scanning schemes that require fast point-to-point deflection.
dc.sourceScopus
dc.subjectElectromagnetic deflection
dc.subjectScanning electron microscope
dc.typeArticle
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.sourcetitleMeasurement Science and Technology
dc.description.volume10
dc.description.issue11
dc.description.page1070-1074
dc.description.codenMSTCE
dc.identifier.isiut000083648300017
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