Please use this identifier to cite or link to this item:
|Title:||Improving the speed of scanning electron microscope deflection systems||Authors:||Lee, K.W.
Scanning electron microscope
|Issue Date:||Nov-1999||Citation:||Lee, K.W., Thong, J.T.L. (1999-11). Improving the speed of scanning electron microscope deflection systems. Measurement Science and Technology 10 (11) : 1070-1074. ScholarBank@NUS Repository.||Abstract:||A simple technique to characterize the response of a SEM deflection system is described. By measuring the delay in the SEM video signal as the primary beam is deflected and swept over a knife-edge, the transient deflection response can be mapped out. The transfer function of the beam deflection is then approximated by exponential functions and appropriate analogue filters are designed to pre-emphasise the deflection coil drive signal in order to increase the deflection speed. This technique is used to decrease the deflection response time from typically ∼6 μs to ∼0.5 μs, thereby allowing the implementation of non-raster scanning schemes that require fast point-to-point deflection.||Source Title:||Measurement Science and Technology||URI:||http://scholarbank.nus.edu.sg/handle/10635/80588||ISSN:||09570233|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on May 18, 2018
WEB OF SCIENCETM
checked on Dec 26, 2018
checked on May 21, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.