Fowler-nordheim stress degradation in gate oxide: Results from gate-to-drain capacitance and charge pumping current

Abstract

The buildup of positive oxide charge and interface trap charge, due to Fowler-Nordheim stress, is observed in the gate-drain overlap region of the MOSFET. Results from gate-to-drain capacitance and charge pumping current show a steady increase in positive charge near the anode interface. Interface trap generation becomes significant when injected electron fluence exceeds ∼1014 cm-2, and dominates net charge creation at higher fluence. © 1997 IEEE.