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Title: Determination of secondary electron spectra from insulators
Authors: Yong, Y.C.
Thong, J.T.L. 
Keywords: Insulators
Secondary electron spectra
Issue Date: 2000
Citation: Yong, Y.C.,Thong, J.T.L. (2000). Determination of secondary electron spectra from insulators. Scanning 22 (3) : 161-166. ScholarBank@NUS Repository.
Abstract: A new technique for the determination of secondary electron (SE) spectra of insulators in a scanning electron microscope environment is presented. It is based on a capacitatively coupled charge measurement by subjecting the insulating film to a controlled pulsed electron beam. With the use of a planar grid analyzer configuration, an algorithm is used to estimate the SE spectrum based on normalized values of the S-curve obtained. Secondary electron spectra from several insulating materials employed in integrated circuit manufacturing, including silicon nitride (Si3N4), AZ 1350J photoresist, and pyralin polyimide, have been measured.
Source Title: Scanning
ISSN: 01610457
Appears in Collections:Staff Publications

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