Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/80298
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dc.titleAnnealing of ultrashallow p+/n junction by 248 nm excimer laser and rapid thermal processing with different preamorphization depths
dc.contributor.authorChong, Y.F.
dc.contributor.authorPey, K.L.
dc.contributor.authorWee, A.T.S.
dc.contributor.authorSee, A.
dc.contributor.authorChan, L.
dc.contributor.authorLu, Y.F.
dc.contributor.authorSong, W.D.
dc.contributor.authorChua, L.H.
dc.date.accessioned2014-10-07T02:55:59Z
dc.date.available2014-10-07T02:55:59Z
dc.date.issued2000-05-29
dc.identifier.citationChong, Y.F.,Pey, K.L.,Wee, A.T.S.,See, A.,Chan, L.,Lu, Y.F.,Song, W.D.,Chua, L.H. (2000-05-29). Annealing of ultrashallow p+/n junction by 248 nm excimer laser and rapid thermal processing with different preamorphization depths. Applied Physics Letters 76 (22) : 3197-3199. ScholarBank@NUS Repository.
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/80298
dc.description.abstractUltrashallow p+/n junctions formed by B+-ion implantation and annealed by spike rapid thermal annealing (RTA) or laser annealing were studied. The effect of the preamorphizing depth on the redistribution of boron atoms after annealing has also been investigated. Our results show that for ultrashallow junctions formed by ultra-low-energy ion implantation and spike RTA, the depth of the preamorphizing implant has very little impact on the junction depth. By optimizing the laser fluence and preamorphization depth, a highly activated, ultrashallow, and abrupt junction can be obtained using a 248 nm excimer laser. The secondary-ion-mass spectrometry results clearly indicate that a step-like profile with a junction depth of 370 Å (for a B+ implant at 1 keV) can be formed with a single-pulse laser irradiation at 0.5 J/cm2. © 2000 American Institute of Physics.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL ENGINEERING
dc.contributor.departmentPHYSICS
dc.description.sourcetitleApplied Physics Letters
dc.description.volume76
dc.description.issue22
dc.description.page3197-3199
dc.description.codenAPPLA
dc.identifier.isiutNOT_IN_WOS
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