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https://scholarbank.nus.edu.sg/handle/10635/75040
Title: | Modeling of the optical torsion micromirror | Authors: | Zhang, X.M. Chau, F.S. Quan, C. Liu, A.Q. |
Issue Date: | 1999 | Citation: | Zhang, X.M., Chau, F.S., Quan, C., Liu, A.Q. (1999). Modeling of the optical torsion micromirror. Proceedings of SPIE - The International Society for Optical Engineering 3899 : 109-116. ScholarBank@NUS Repository. | Abstract: | Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experiment data as testing is in progress. | Source Title: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/75040 | ISSN: | 0277786X |
Appears in Collections: | Staff Publications |
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