Please use this identifier to cite or link to this item:
DC FieldValue
dc.titleThree-dimensional microfabrication by photolithography and electroforming
dc.contributor.authorThian, S.C.H.
dc.contributor.authorTang, L.X.
dc.contributor.authorFuh, J.Y.H.
dc.contributor.authorWong, Y.S.
dc.contributor.authorLu, L.
dc.contributor.authorLoh, H.T.
dc.identifier.citationThian, S.C.H.,Tang, L.X.,Fuh, J.Y.H.,Wong, Y.S.,Lu, L.,Loh, H.T. (2004). Three-dimensional microfabrication by photolithography and electroforming. ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition : 795-802. ScholarBank@NUS Repository.
dc.description.abstractHighly innovative microfabrication techniques have emerged from the laboratory environment during the last decade, creating a new method for developing and producing microstructures. For instance, structures with micron features and tolerances in the submicron range are being used in optical systems as waveguides, switches, or connectors, and as read-write heads in miniaturized disk drives, and micro-structured orifices are used for ink-jet printing and fuel injection applications. This research work investigates the feasibility of using liquid photopolymer, commonly used in RP, instead of liquid photoresists in microfabrication. Liquid photopolymer is very similar to liquid photoresists except that photopolymer do not need to have any baking process during the fabrication stage. The obtained pattern is transferred from the photomask with excimer laser as the energy source. Electroplating is also carried out to obtain a metallic shell of the structure so as to achieve a cavity for moldings. The early stages of experiments demonstrated that liquid photopolymer could be used instead of liquid photoresists in microfabrication. © Professional Engineering Publishing 2004.
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.sourcetitleICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Page view(s)

checked on Jun 23, 2022

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.