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https://doi.org/10.1109/OMEMS.2010.5672205
Title: | Optical scanning with MEMS in-plane vibratory gratings and its applications | Authors: | Zhou, G. Du, Y. Cheo, K.K.L. Yu, H. Chau, F.S. |
Issue Date: | 2010 | Citation: | Zhou, G., Du, Y., Cheo, K.K.L., Yu, H., Chau, F.S. (2010). Optical scanning with MEMS in-plane vibratory gratings and its applications. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 21-22. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2010.5672205 | Abstract: | MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging. Coupling a grating platform to an in-plane moving structure is useful for real-time motion measurement which would otherwise be difficult to analyze. These applications are described including a recent development in the structural design of a double-layer layout which further improves the performance of the grating scanner. ©2010 IEEE. | Source Title: | 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 | URI: | http://scholarbank.nus.edu.sg/handle/10635/73719 | ISBN: | 9781424489251 | DOI: | 10.1109/OMEMS.2010.5672205 |
Appears in Collections: | Staff Publications |
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