Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.429583
DC FieldValue
dc.titleEvaluation of micro-beam deflection using interferometry
dc.contributor.authorWang, S.H.
dc.contributor.authorTay, C.J.
dc.contributor.authorQuan, C.
dc.contributor.authorShang, H.M.
dc.date.accessioned2014-06-19T05:35:07Z
dc.date.available2014-06-19T05:35:07Z
dc.date.issued2001
dc.identifier.citationWang, S.H., Tay, C.J., Quan, C., Shang, H.M. (2001). Evaluation of micro-beam deflection using interferometry. Proceedings of SPIE - The International Society for Optical Engineering 4317 : 262-267. ScholarBank@NUS Repository. https://doi.org/10.1117/12.429583
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/73438
dc.description.abstractCurrent trends in the miniaturization of microelectromechanical system (MEMS) require the use of increasingly smaller components. MEMS has already offered challenging opportunities for improving test techniques. In this paper we have developed a technique for testing deflections of a micro-beam in an accelerometer under point-force load. The technique is based on light interferometry. A collimated monochromatic light is directed into an air-wedge consists of an optical flat and a micro-beam. A long distance microscope with a CCD camera is utilized to capture the interference fringe pattern which results from recombination of two-beam reflected from the optical flat and the micro-beam. The resulting fringe patterns are analyzed by the use of Fast Fourier Transform (FFT) and deflections of the micro-beam are obtained. The experimental results show that the proposed technique is relatively simple and accurate, and is a potential method for conducting measurement on micro-components.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.429583
dc.sourceScopus
dc.subjectDeflection measurement
dc.subjectFFT
dc.subjectInterferometry
dc.subjectMEMS
dc.subjectMicro-beam
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1117/12.429583
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume4317
dc.description.page262-267
dc.description.codenPSISD
dc.identifier.isiut000171040900042
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