Development of electrodes for the application of microbatteries

Abstract

Miniaturization of electronic devices such as laboratory-on-chip or system-on-ship requires small power supply unit such as in micrometer size. Therefore all-solid-state thin film microbatteries become important in those applications. This paper reviews our studies and developments of thin film electrodes in the thickness of several hundred nanometers which were fabricated by a pulsed laser deposition technique. It has been demonstrated that the thin film electrodes not only have high electric capacity but also fast charge-discharge rate. In addition the relationship between thin film structure, deposition parameters and electrochemical properties of thin film electrodes are also discussed in the paper.