Design and characterization of a fourier transform micro-spectrometer

Abstract

In this paper, we present a Fourier Transform micro-spectrometer which works based on a lamellar grating interferometer. The spectrometer model is electrostatically driven by parallel plate actuators which change the optical path difference (OPD) between movable grating facets and fixed ones. With a 200V input voltage, a maximum OPD of 48.7μm is achieved. The spectrum of a combined light source of a diode-pumped solid-state (DPSS) laser (λ=532.0nm) and a laser diode (λ=637.2nm) is experimentally acquired to demonstrate the performance of the model. The reconstructed spectrum displays two separate spectral peaks at 530.5nm and 635.2nm and the corresponding full-width at half-maximum (FWHM) resolutions are 9.8nm and 12.8nm respectively, indicating good wavelength accuracy and optical resolution. © (2009) Trans Tech Publications.