Please use this identifier to cite or link to this item:
https://doi.org/10.1109/OMEMS.2012.6318892
DC Field | Value | |
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dc.title | An electrostatic in-plane rotational MEMS micro-scanner | |
dc.contributor.author | Mu, X. | |
dc.contributor.author | Zhou, G. | |
dc.contributor.author | Du, Y. | |
dc.contributor.author | Kumar, A.S. | |
dc.contributor.author | Chau, F.S. | |
dc.contributor.author | Yu, H. | |
dc.contributor.author | Tsai, J.M.-L. | |
dc.date.accessioned | 2014-06-19T05:31:54Z | |
dc.date.available | 2014-06-19T05:31:54Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | Mu, X., Zhou, G., Du, Y., Kumar, A.S., Chau, F.S., Yu, H., Tsai, J.M.-L. (2012). An electrostatic in-plane rotational MEMS micro-scanner. International Conference on Optical MEMS and Nanophotonics : 240-241. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318892 | |
dc.identifier.isbn | 9781457715112 | |
dc.identifier.issn | 21605033 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/73164 | |
dc.description.abstract | The paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication. © 2012 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OMEMS.2012.6318892 | |
dc.source | Scopus | |
dc.subject | MEMS | |
dc.subject | optical coherence tomography | |
dc.subject | pyramidal polygon reflector | |
dc.type | Conference Paper | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1109/OMEMS.2012.6318892 | |
dc.description.sourcetitle | International Conference on Optical MEMS and Nanophotonics | |
dc.description.page | 240-241 | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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