Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2012.6318892
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dc.titleAn electrostatic in-plane rotational MEMS micro-scanner
dc.contributor.authorMu, X.
dc.contributor.authorZhou, G.
dc.contributor.authorDu, Y.
dc.contributor.authorKumar, A.S.
dc.contributor.authorChau, F.S.
dc.contributor.authorYu, H.
dc.contributor.authorTsai, J.M.-L.
dc.date.accessioned2014-06-19T05:31:54Z
dc.date.available2014-06-19T05:31:54Z
dc.date.issued2012
dc.identifier.citationMu, X.,Zhou, G.,Du, Y.,Kumar, A.S.,Chau, F.S.,Yu, H.,Tsai, J.M.-L. (2012). An electrostatic in-plane rotational MEMS micro-scanner. International Conference on Optical MEMS and Nanophotonics : 240-241. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2012.6318892" target="_blank">https://doi.org/10.1109/OMEMS.2012.6318892</a>
dc.identifier.isbn9781457715112
dc.identifier.issn21605033
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/73164
dc.description.abstractThe paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication. © 2012 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OMEMS.2012.6318892
dc.sourceScopus
dc.subjectMEMS
dc.subjectoptical coherence tomography
dc.subjectpyramidal polygon reflector
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1109/OMEMS.2012.6318892
dc.description.sourcetitleInternational Conference on Optical MEMS and Nanophotonics
dc.description.page240-241
dc.identifier.isiutNOT_IN_WOS
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