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https://doi.org/10.1109/OMEMS.2008.4607847
| Title: | A micromachined vibratory sub-wavelength diffraction grating laser scanner | Authors: | Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. |
Keywords: | Diffraction grating Micro-opto-electromechanical systems (MOEMS) Micro-scanners |
Issue Date: | 2008 | Citation: | Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2008). A micromachined vibratory sub-wavelength diffraction grating laser scanner. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS : 98-99. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2008.4607847 | Abstract: | A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7° and scanning frequency of 20.35 kHz are experimentally achieved © 2008 IEEE. | Source Title: | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS | URI: | http://scholarbank.nus.edu.sg/handle/10635/73043 | ISBN: | 9781424419180 | DOI: | 10.1109/OMEMS.2008.4607847 |
| Appears in Collections: | Staff Publications |
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