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Title: A 50kHz micromachined electrostatic driven vibratory grating laser scanner
Authors: Du, Y. 
Zhou, G. 
Chau, F.S. 
Cheo, K.L. 
Zhang, Q.
Feng, H.
Keywords: Diffraction graitng
Laser scanners
Micro resonator
Micro-opto- electromechanical-systems (MOEMS)
Issue Date: 2011
Citation: Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H. (2011). A 50kHz micromachined electrostatic driven vibratory grating laser scanner. Physics Procedia 19 : 308-314. ScholarBank@NUS Repository.
Abstract: A 50kHz micromachined electrostatic driven vibratory grating laser scanner has been successfully developed for high-speed laser scanning applications. Unlike the conventional grating platform having uniform thickness across the entire diffraction surface, the grating platform in this study is thinned and reinforced by a circular frame, which is used to reduce its rotational inertia and keep its rigidity. The scanner is fabricated using a simple silicon-on-insulator (SOI) technology based micromachining process with only 4 photo masks used. This paper presents the design, simulation, fabrication process and experimental measurement results of the high-speed vibratory grating scanner. The prototype scanner with a 1mm diameter diffraction grating is capable of scanning at 50.192kHz with and optical scan angle of 14.1° when illuminated with a 635nm wavelength incident laser beam. © 2011 Published by Elsevier B.V.
Source Title: Physics Procedia
ISSN: 18753884
DOI: 10.1016/j.phpro.2011.06.166
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