Please use this identifier to cite or link to this item:
|Title:||Temperature Measurement on Micromachined IR Bolometers Using an Infrared Microscope||Authors:||Trigg, A.D.
|Issue Date:||1999||Citation:||Trigg, A.D.,Sridhar, U.,Lee, H.S.,Karunasiri, G. (1999). Temperature Measurement on Micromachined IR Bolometers Using an Infrared Microscope. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 189-193. ScholarBank@NUS Repository.||Abstract:||Thermal properties are critical to the performance of micromachined silicon bolometers. In order to verify thermal models of the device, a means of measuring the local temperature distribution over the element is required, as it is heated by passing current through a thin film titanium meander. Because of the very low thermal mass of the membrane a non-contact method of temperature measurement is needed. Most conventional thermal imaging systems operate in the wavelength range 5-15 μm and offer poor spatial resolution but in this work an infrared microscope, operating at shorter wavelengths, was used. The microscope comprises an objective lens which focuses radiation onto a cooled (77K) cadmium mercury telluride focal plane array sensitive over the range 800 nm to 2500nm. For this application a bandpass filter centered at 2150 nm was used. Good agreement was obtained between finite element modeling of the temperature distribution, using ANSYS, and the measured data.||Source Title:||Conference Proceedings from the International Symposium for Testing and Failure Analysis||URI:||http://scholarbank.nus.edu.sg/handle/10635/72963|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Aug 18, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.