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Title: High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability
Authors: Tao, J.M. 
Chim, W.K. 
Chan, D.S.H. 
Phang, J.C.H. 
Liu, Y.Y.
Issue Date: 1996
Citation: Tao, J.M.,Chim, W.K.,Chan, D.S.H.,Phang, J.C.H.,Liu, Y.Y. (1996). High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability. Annual Proceedings - Reliability Physics (Symposium) : 360-365. ScholarBank@NUS Repository.
Abstract: A new spectroscopic photon emission microscope system (SPEMS) with high-sensitivity and continuous wavelength spectroscopic capability is presented. With the specially-designed light collection and transmission optics, high-resolution spectral characteristics can be acquired from very low-level light emissions. Two new wavelength parameters have been introduced to describe the bias-dependent spectral variation. The potential use of these two parameters as well as the spectral characteristics to identify failure mechanisms is also discussed.
Source Title: Annual Proceedings - Reliability Physics (Symposium)
ISSN: 00999512
Appears in Collections:Staff Publications

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