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Title: High-order terminal iterative learning control scheme
Authors: Chen, Yangquan 
Xu, Jian-Xin 
Wen, Changyun
Issue Date: 1997
Citation: Chen, Yangquan,Xu, Jian-Xin,Wen, Changyun (1997). High-order terminal iterative learning control scheme. Proceedings of the IEEE Conference on Decision and Control 4 : 3771-3772. ScholarBank@NUS Repository.
Abstract: A high-order terminal iterative learning control (ILC) scheme is proposed where only the terminal output tracking error instead of the entire output trajectory tracking error is used to update the control profile. A convergence condition is obtained for a class of uncertain discrete-time time-varying linear systems. An application example is presented, by simulation, for a rapid thermal processing chemical vapor deposition (RTPCVD) thickness control problem in wafer fab industry.
Source Title: Proceedings of the IEEE Conference on Decision and Control
ISSN: 01912216
Appears in Collections:Staff Publications

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