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Title: CMOS low noise capacitance measurement circuit for micromachined gyroscope
Authors: Yu, Wen 
Lim, Yong Ching 
Tay, Francis E.H. 
Liang, Yung C. 
Issue Date: 1999
Citation: Yu, Wen,Lim, Yong Ching,Tay, Francis E.H.,Liang, Yung C. (1999). CMOS low noise capacitance measurement circuit for micromachined gyroscope. Proceedings of SPIE - The International Society for Optical Engineering 3891 : 296-303. ScholarBank@NUS Repository.
Abstract: A CMOS low noise, high sensitivity circuit suitable for detecting the change in capacitance along the sensing direction of a vibrating gyroscope with interdigitated finger comb structure is presented. The circuit is used in conjunction with a fully differential capacitor bridge, which is formed by the sensing port of the mechanical structure. A mathematical model of a gyroscope is established for electrical simulation with electrical equivalent circuit. Theoretical analysis and computer simulations using HSPICE show that as low as 0.2aF change in capacitance is detectable under ideal condition. Two high frequency carriers of the same magnitude and frequency are used in the circuit. Simulation results review that the resolution of the technique is severely affected by the mismatch of the high frequency carriers. The effect of parasitic capacitance, which is inherent in the silicon micromachining technology, can be greatly reduced by selecting appropriate circuit configuration.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277786X
Appears in Collections:Staff Publications

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