Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.phpro.2008.07.092
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dc.titleThe energy dispersion characteristics of a magnetic beam separator
dc.contributor.authorHoang, H.Q.
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-06-19T03:30:01Z
dc.date.available2014-06-19T03:30:01Z
dc.date.issued2008-08
dc.identifier.citationHoang, H.Q., Khursheed, A. (2008-08). The energy dispersion characteristics of a magnetic beam separator. Physics Procedia 1 (1) : 161-166. ScholarBank@NUS Repository. https://doi.org/10.1016/j.phpro.2008.07.092
dc.identifier.issn18753884
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/71976
dc.description.abstractThis paper presents an energy spectrometer design for scanning electron microscopy, where the spectrum of secondary, Auger and backscattered electrons can be captured at the same time. The spectrometer is based upon the use of a magnetic sector beam separator that deflects the primary beam while dispersing the scattered electrons. A series of retarding field magnetic sector post-deflectors is used to focus the scattered electrons on to a multi-channel detector plane. Initial simulation results predict that prefocusing the scattered electrons into the beam separator via a transfer lens will significantly reduce the effect of angular dispersion and improve the beam separator spectrometer's energy resolution. © 2008 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.phpro.2008.07.092
dc.sourceScopus
dc.subjectElectron energy loss spectroscopy
dc.subjectEnergy dispersion
dc.subjectMagnetic separator
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.phpro.2008.07.092
dc.description.sourcetitlePhysics Procedia
dc.description.volume1
dc.description.issue1
dc.description.page161-166
dc.identifier.isiut000275907500020
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