Please use this identifier to cite or link to this item:
|Title:||Scanning near-field photon emission microscopy||Authors:||Isakov, D.
|Issue Date:||2008||Citation:||Isakov, D., Geinzer, T., Tio, A., Phang, J.C.H., Zhang, Y., Balk, L.J. (2008). Scanning near-field photon emission microscopy. IEEE International Reliability Physics Symposium Proceedings : 575-579. ScholarBank@NUS Repository. https://doi.org/10.1109/RELPHY.2008.4558947||Abstract:||A Scanning Near-field Photon Emission Microscope (SNPEM) for monitoring photon emission sites with a spatial resolution of between 50 to 200 nm is described. A protrusion type probe with a base diameter larger than a wavelength is proposed as a good compromise between resolution and sensitivity. Photon emissions from silicon pn junction and n-MOSFET have been detected with resolution clearly better than the far-field PEM (FFPEM). Features in photon emission distribution smaller than 200 nm were revealed in spite the fact that metal lines prevented the SNPEM probe to reach near-field condition with an actual emission source. ©2008 IEEE.||Source Title:||IEEE International Reliability Physics Symposium Proceedings||URI:||http://scholarbank.nus.edu.sg/handle/10635/71706||ISBN:||9781424420506||ISSN:||15417026||DOI:||10.1109/RELPHY.2008.4558947|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jul 22, 2019
checked on Jul 21, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.