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https://doi.org/10.1109/IRPS.2009.5173354
| Title: | Reliable and accurate temperature measurement using scanning thermal microscopy with double lock-in amplification | Authors: | Ho, H.W. Zheng, X.H. Phang, J.C.H. Balk, L.J. |
Keywords: | Double lock-in Localized temperature Scanning thermal microscopy |
Issue Date: | 2009 | Citation: | Ho, H.W., Zheng, X.H., Phang, J.C.H., Balk, L.J. (2009). Reliable and accurate temperature measurement using scanning thermal microscopy with double lock-in amplification. IEEE International Reliability Physics Symposium Proceedings : 804-807. ScholarBank@NUS Repository. https://doi.org/10.1109/IRPS.2009.5173354 | Abstract: | A scanning thermal microscopy (SThM) technique incorporating double lock-in amplification is developed to minimize temperature drift and artifacts due to probe-sample contact area. The localized temperature change of an interconnect biased with a switching current supply is measured with improved signal level and a significant reduction of topographic artifacts. ©2009 IEEE. | Source Title: | IEEE International Reliability Physics Symposium Proceedings | URI: | http://scholarbank.nus.edu.sg/handle/10635/71609 | ISBN: | 0780388038 | ISSN: | 15417026 | DOI: | 10.1109/IRPS.2009.5173354 |
| Appears in Collections: | Staff Publications |
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