Please use this identifier to cite or link to this item:
|Title:||Precision motion control system for ultra-precision semiconductor and electon components manufacturing||Authors:||Tan, K.K.
|Issue Date:||2001||Citation:||Tan, K.K.,Dou, H.F.,Tang, K.Z. (2001). Precision motion control system for ultra-precision semiconductor and electon components manufacturing. Proceedings - Electronic Components and Technology Conference : 1372-1379. ScholarBank@NUS Repository.||Abstract:||In this paper, the development of a motion control system for ultra-precision semiconductor and electronic components manufacturing is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface and all constituent control components will be elaborated on in the paper.||Source Title:||Proceedings - Electronic Components and Technology Conference||URI:||http://scholarbank.nus.edu.sg/handle/10635/71489||ISSN:||05695503|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Apr 19, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.