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|Title:||MEMS-based devices||Authors:||Lee, C.||Issue Date:||2012||Citation:||Lee, C. (2012). MEMS-based devices. Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 : 539-540. ScholarBank@NUS Repository. https://doi.org/10.1109/OECC.2012.6276561||Abstract:||Novel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well. © 2012 IEEE.||Source Title:||Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012||URI:||http://scholarbank.nus.edu.sg/handle/10635/70913||ISBN:||9781467309776||DOI:||10.1109/OECC.2012.6276561|
|Appears in Collections:||Staff Publications|
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