Please use this identifier to cite or link to this item:
https://doi.org/10.1117/12.413755
DC Field | Value | |
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dc.title | Laser microprocessing and the applications in microelectronics industry | |
dc.contributor.author | Lu, Y.F. | |
dc.contributor.author | Ren, Z.M. | |
dc.date.accessioned | 2014-06-19T03:15:55Z | |
dc.date.available | 2014-06-19T03:15:55Z | |
dc.date.issued | 2001 | |
dc.identifier.citation | Lu, Y.F., Ren, Z.M. (2001). Laser microprocessing and the applications in microelectronics industry. Proceedings of SPIE - The International Society for Optical Engineering 4157 : 191-199. ScholarBank@NUS Repository. https://doi.org/10.1117/12.413755 | |
dc.identifier.issn | 0277786X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/70762 | |
dc.description.abstract | Laser microprocessing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser microprocessing, (2) laser texturing, laser bumping and related technologies (3) real-time monitoring of laser surface processing, (4) laser-induced controllable periodic structures and (5) laser nano-etching and nanolithography by tip-enhanced laser irradiation. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.413755 | |
dc.source | Scopus | |
dc.subject | Laser bumping | |
dc.subject | Laser cleaning | |
dc.subject | Laser microprocessing | |
dc.subject | Laser nanoprocessing | |
dc.subject | Laser texturing | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1117/12.413755 | |
dc.description.sourcetitle | Proceedings of SPIE - The International Society for Optical Engineering | |
dc.description.volume | 4157 | |
dc.description.page | 191-199 | |
dc.description.coden | PSISD | |
dc.identifier.isiut | 000168412200024 | |
Appears in Collections: | Staff Publications |
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