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dc.titleLaser microprocessing and nanoengineering of large-area functional micro/nanostructures
dc.contributor.authorTang, M.
dc.contributor.authorXie, X.Z.
dc.contributor.authorYang, J.
dc.contributor.authorChen, Z.C.
dc.contributor.authorXu, L.
dc.contributor.authorChoo, Y.S.
dc.contributor.authorHong, M.H.
dc.identifier.citationTang, M., Xie, X.Z., Yang, J., Chen, Z.C., Xu, L., Choo, Y.S., Hong, M.H. (2011). Laser microprocessing and nanoengineering of large-area functional micro/nanostructures. Proceedings of SPIE - The International Society for Optical Engineering 8204 : -. ScholarBank@NUS Repository.
dc.description.abstractLaser microprocessing and nanoengineering are of great interest to both scientists and engineers, since the inspired properties of functional micro/nanostructures over large areas can lead to numerous unique applications. Currently laser processing systems combined with high speed automation ensure the focused laser beam to process various materials at a high throughput and a high accuracy over large working areas. UV lasers are widely used in both laser microprocessing and nanoengineering. However by improving the processing methods, green pulsed laser is capable of replacing UV lasers to make high aspect ratio micro-grooves on fragile and transparent sapphire substrates. Laser micro-texturing can also tune the wetting property of metal surfaces from hydrophilic to super-hydrophobic at a contact angle of 161° without chemical coating. Laser microlens array (MLA) can split a laser beam into multiple laser beams and reduce the laser spot size down to sub-microns. It can be applied to fabricate split ring resonator (SRR) meta-materials for THz sensing, surface plasmonic resonance (SPR) structures for NIR and molding tools for soft lithography. Furthermore, laser interference lithography combined with thermal annealing can obtain a large area of sub-50nm nano-dot clusters used for SPR applications. © 2011 SPIE.
dc.subjectFunctional micro/nanostructures
dc.subjectLaser microprocessing and nanoengineering
dc.subjectMicrolens array
dc.subjectSuper-hydrophobic surface
dc.subjectSurface plasmonic resonance
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentCIVIL & ENVIRONMENTAL ENGINEERING
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
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