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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nima.2010.12.010
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dc.titleExperimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes
dc.contributor.authorHoang, H.Q.
dc.contributor.authorOsterberg, M.
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-06-19T03:09:59Z
dc.date.available2014-06-19T03:09:59Z
dc.date.issued2011-07-21
dc.identifier.citationHoang, H.Q., Osterberg, M., Khursheed, A. (2011-07-21). Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 645 (1) : 241-244. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2010.12.010
dc.identifier.issn01689002
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/70251
dc.description.abstractThis paper presents experimental results from a second-order focusing toroidal spectrometer attachment for the scanning electron microscope (SEM). The energy resolution of the spectrometer is measured to be 0.38% for an angular spread of ±8°, close to the numerical simulated value of 0.32% based upon direct ray tracing. This result provides experimental confirmation of the superior focusing optics predicted for the spectrometer. Examples of secondary electron (SE) and backscattered electron (BSE) spectra acquired by the attachment are also presented. © 2010 Elsevier B.V. Allrights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nima.2010.12.010
dc.sourceScopus
dc.subjectEnergy electron spectrometer
dc.subjectScanning electron microscopy
dc.subjectToroidal spectrometer
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.nima.2010.12.010
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
dc.description.volume645
dc.description.issue1
dc.description.page241-244
dc.description.codenNIMAE
dc.identifier.isiut000292713900045
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