Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab

Abstract

In this paper, we demonstrate the experimental study of Fano resonance in a microfabricated phononic crystal (PnC) resonator by creating defects on a two-dimensional (2-D) silicon PnC slab. Our experimental results show that for this type of PnC resonator, the local resonance mechanism plays a dominant role in the acoustic wave transmission, rather than the non-resonant propagating mechanism. © 2013 IEEE.