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https://doi.org/10.1109/IRPS.2009.5173273
| Title: | Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM / ESEM-hybrid-system | Authors: | Tiedemann, A.-K. Heiderhoff, R. Balk, L.J. Phang, J.C.H. |
Keywords: | Hybrid-system Near-field SThM Temperature distribution Thermal conductivity |
Issue Date: | 2009 | Citation: | Tiedemann, A.-K., Heiderhoff, R., Balk, L.J., Phang, J.C.H. (2009). Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM / ESEM-hybrid-system. IEEE International Reliability Physics Symposium Proceedings : 327-332. ScholarBank@NUS Repository. https://doi.org/10.1109/IRPS.2009.5173273 | Abstract: | A hybrid-system consisting of a Scanning Thermal Microscope and an Environmental Scanning Electron Microscope is used to analyze directional thermal conductivity mechanisms. An electron beam stimulates locally variable hot spots, whereas a thermal probe is used as a locally resolving detector. The detected temperature oscillation strongly depends both on the local thermal conductivity and on the directivity of the heat transport within the investigated sample. This may allow analysis of linear structures like interfaces within materials. ©2009 IEEE. | Source Title: | IEEE International Reliability Physics Symposium Proceedings | URI: | http://scholarbank.nus.edu.sg/handle/10635/70147 | ISBN: | 0780388038 | ISSN: | 15417026 | DOI: | 10.1109/IRPS.2009.5173273 |
| Appears in Collections: | Staff Publications |
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