Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform

Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/69880

Title:	Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
Authors:	Lu, Y. Pang, C.K. Chen, J. Zhu, H. Yang, J.P. Mou, J.Q. Guo, G.X. Chen, B.M. Lee, T.H.
Keywords:	Comb drive H∞ control MEMs control Probe storage
Issue Date:	2005
Citation:	Lu, Y.,Pang, C.K.,Chen, J.,Zhu, H.,Yang, J.P.,Mou, J.Q.,Guo, G.X.,Chen, B.M.,Lee, T.H. (2005). Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 1 : 19-24. ScholarBank@NUS Repository.
Abstract:	We report a design of the micro X-Y stage with 6 mm × 6 mm recording media platform, which is actuated by comb-drives. The fabrication process including the integration of the 40 nm thickness PMMA (polymethyl methacrylate) recording media is presented. The prototype of the micro X-Y stage is fabricated by micromachining techniques. The FEA (finite element analysis) results show that the first two modes of the X-Y stage are in plane modes at 440 Hz. The displacement of the media platform can achieve 20 μm with the driving voltage of 55 V. A control scheme is designed and simulated. It shows that the closed-loop system has strong error and vibration rejection capabilities. ©2005 IEEE.
Source Title:	IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
URI:	http://scholarbank.nus.edu.sg/handle/10635/69880
Appears in Collections:	Staff Publications

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