Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/69880
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dc.titleDesign, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
dc.contributor.authorLu, Y.
dc.contributor.authorPang, C.K.
dc.contributor.authorChen, J.
dc.contributor.authorZhu, H.
dc.contributor.authorYang, J.P.
dc.contributor.authorMou, J.Q.
dc.contributor.authorGuo, G.X.
dc.contributor.authorChen, B.M.
dc.contributor.authorLee, T.H.
dc.date.accessioned2014-06-19T03:05:43Z
dc.date.available2014-06-19T03:05:43Z
dc.date.issued2005
dc.identifier.citationLu, Y.,Pang, C.K.,Chen, J.,Zhu, H.,Yang, J.P.,Mou, J.Q.,Guo, G.X.,Chen, B.M.,Lee, T.H. (2005). Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 1 : 19-24. ScholarBank@NUS Repository.
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69880
dc.description.abstractWe report a design of the micro X-Y stage with 6 mm × 6 mm recording media platform, which is actuated by comb-drives. The fabrication process including the integration of the 40 nm thickness PMMA (polymethyl methacrylate) recording media is presented. The prototype of the micro X-Y stage is fabricated by micromachining techniques. The FEA (finite element analysis) results show that the first two modes of the X-Y stage are in plane modes at 440 Hz. The displacement of the media platform can achieve 20 μm with the driving voltage of 55 V. A control scheme is designed and simulated. It shows that the closed-loop system has strong error and vibration rejection capabilities. ©2005 IEEE.
dc.sourceScopus
dc.subjectComb drive
dc.subjectH∞ control
dc.subjectMEMs control
dc.subjectProbe storage
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.sourcetitleIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
dc.description.volume1
dc.description.page19-24
dc.identifier.isiutNOT_IN_WOS
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