Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator

Abstract

Two photonic crystal rings of hexagonal lattice are lying transversely and longitudinally in silicon microcantilever at the junction of the microcantilever and the substrate. This unique dual nano-ring (DNR) resonator demonstrates channel drop filter characteristics. When DNR is used as sensing element of a microcantilever sensor, the wavelength shift of resonant peak measured at the backward drop terminal is a function of applied force at the microcantilever tip. The derived Q-factor is about 3000, and the minimum detectable force can be as small as 37nN for longitudinal case and 16.7nN for transverse case. ©2010 IEEE.