Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.810798
DC FieldValue
dc.titleCharacterization techniques for NEMS/MEMS devices
dc.contributor.authorWong, C.-L.
dc.contributor.authorPalaniapan, M.
dc.date.accessioned2014-06-19T03:02:26Z
dc.date.available2014-06-19T03:02:26Z
dc.date.issued2008
dc.identifier.citationWong, C.-L.,Palaniapan, M. (2008). Characterization techniques for NEMS/MEMS devices. Proceedings of SPIE - The International Society for Optical Engineering 7268 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1117/12.810798" target="_blank">https://doi.org/10.1117/12.810798</a>
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69593
dc.description.abstractIn this work, three useful techniques for dynamic motion characterization of MEMS devices are presented, namely network analyzer, acoustic phonon detection and stroboscopic SEM techniques. Proof-of-concept experiments using an MEMS electrostatic resonator reveal reliable and consistent measurement results from the three techniques. The network analyzer characterization technique is most widely used in practice due to its convenience, high sensitivity and high speed. The second acoustic phonon technique features non-invasive and package level testing, but it is still an indirect characterization method, like the network analyzer. In acoustic phonon detection, mechanical waves (phonons) generated by the actuated MEMS device are used as the coupling mechanism through which information on the dynamic mechanical state of the device can be obtained. The third stroboscopic SEM technique is capable of directly measuring the device motion, but its throughput is low and hence not suitable for high volume testing. The stroboscopic SEM imaging system is based on time-gated sampling of the analogue secondary electron (SE) signal. Unlike conventional SEM, stroboscopic SEM is able to detect the actual position of the structure at a specific point in time by taking a time-gated sample of the SEM SE signal at a specific phase of the structure's motion. © 2008 SPIE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.810798
dc.sourceScopus
dc.subjectAcoustic phonon technique
dc.subjectMEMS
dc.subjectNetwork analyzer
dc.subjectResonator
dc.subjectSEM
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1117/12.810798
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume7268
dc.description.page-
dc.description.codenPSISD
dc.identifier.isiutNOT_IN_WOS
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