Please use this identifier to cite or link to this item: https://doi.org/10.1361/cp2008istfa025
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dc.titleApplications of scanning Near-field photon emission microscopy
dc.contributor.authorIsakov, D.
dc.contributor.authorTan, B.
dc.contributor.authorPhang, J.
dc.contributor.authorYeo, Y.
dc.contributor.authorTio, A.
dc.contributor.authorZhang, Y.
dc.contributor.authorGeinzer, T.
dc.contributor.authorBalk, L.
dc.date.accessioned2014-06-19T03:00:42Z
dc.date.available2014-06-19T03:00:42Z
dc.date.issued2008
dc.identifier.citationIsakov, D., Tan, B., Phang, J., Yeo, Y., Tio, A., Zhang, Y., Geinzer, T., Balk, L. (2008). Applications of scanning Near-field photon emission microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 25-29. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa025
dc.identifier.isbn9780871707147
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69438
dc.description.abstractIn this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. Copyright © 2008 ASM International ®.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1361/cp2008istfa025
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1361/cp2008istfa025
dc.description.sourcetitleConference Proceedings from the International Symposium for Testing and Failure Analysis
dc.description.page25-29
dc.identifier.isiut000288182500005
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