Please use this identifier to cite or link to this item:
https://doi.org/10.1361/cp2008istfa025
| DC Field | Value | |
|---|---|---|
| dc.title | Applications of scanning Near-field photon emission microscopy | |
| dc.contributor.author | Isakov, D. | |
| dc.contributor.author | Tan, B. | |
| dc.contributor.author | Phang, J. | |
| dc.contributor.author | Yeo, Y. | |
| dc.contributor.author | Tio, A. | |
| dc.contributor.author | Zhang, Y. | |
| dc.contributor.author | Geinzer, T. | |
| dc.contributor.author | Balk, L. | |
| dc.date.accessioned | 2014-06-19T03:00:42Z | |
| dc.date.available | 2014-06-19T03:00:42Z | |
| dc.date.issued | 2008 | |
| dc.identifier.citation | Isakov, D., Tan, B., Phang, J., Yeo, Y., Tio, A., Zhang, Y., Geinzer, T., Balk, L. (2008). Applications of scanning Near-field photon emission microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 25-29. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa025 | |
| dc.identifier.isbn | 9780871707147 | |
| dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/69438 | |
| dc.description.abstract | In this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. Copyright © 2008 ASM International ®. | |
| dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1361/cp2008istfa025 | |
| dc.source | Scopus | |
| dc.type | Conference Paper | |
| dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
| dc.description.doi | 10.1361/cp2008istfa025 | |
| dc.description.sourcetitle | Conference Proceedings from the International Symposium for Testing and Failure Analysis | |
| dc.description.page | 25-29 | |
| dc.identifier.isiut | 000288182500005 | |
| Appears in Collections: | Staff Publications | |
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