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https://doi.org/10.1361/cp2008istfa025
| Title: | Applications of scanning Near-field photon emission microscopy | Authors: | Isakov, D. Tan, B. Phang, J. Yeo, Y. Tio, A. Zhang, Y. Geinzer, T. Balk, L. |
Issue Date: | 2008 | Citation: | Isakov, D., Tan, B., Phang, J., Yeo, Y., Tio, A., Zhang, Y., Geinzer, T., Balk, L. (2008). Applications of scanning Near-field photon emission microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 25-29. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa025 | Abstract: | In this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. Copyright © 2008 ASM International ®. | Source Title: | Conference Proceedings from the International Symposium for Testing and Failure Analysis | URI: | http://scholarbank.nus.edu.sg/handle/10635/69438 | ISBN: | 9780871707147 | DOI: | 10.1361/cp2008istfa025 |
| Appears in Collections: | Staff Publications |
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