Please use this identifier to cite or link to this item:
https://doi.org/10.1361/cp2008istfa025
| Title: | Applications of scanning Near-field photon emission microscopy | Authors: | Isakov, D. Tan, B. Phang, J. Yeo, Y. Tio, A. Zhang, Y. Geinzer, T. Balk, L. |
Issue Date: | 2008 | Citation: | Isakov, D., Tan, B., Phang, J., Yeo, Y., Tio, A., Zhang, Y., Geinzer, T., Balk, L. (2008). Applications of scanning Near-field photon emission microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 25-29. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa025 | Abstract: | In this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. Copyright © 2008 ASM International ®. | Source Title: | Conference Proceedings from the International Symposium for Testing and Failure Analysis | URI: | http://scholarbank.nus.edu.sg/handle/10635/69438 | ISBN: | 9780871707147 | DOI: | 10.1361/cp2008istfa025 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
SCOPUSTM
Citations
1
checked on Feb 1, 2023
WEB OF SCIENCETM
Citations
1
checked on Feb 1, 2023
Page view(s)
170
checked on Jan 26, 2023
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.