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Title: A novel micromechanical resonator using two-dimensional phononic crystal slab
Authors: Wang, N.
Hsiao, F.-L.
Palaniapan, M. 
Tsai, J.M.
Soon, B.W.
Kwong, D.-L.
Lee, C. 
Keywords: Cavity-mode
CMOS compatible
Phononic crystal
Issue Date: 2011
Citation: Wang, N., Hsiao, F.-L., Palaniapan, M., Tsai, J.M., Soon, B.W., Kwong, D.-L., Lee, C. (2011). A novel micromechanical resonator using two-dimensional phononic crystal slab. Advanced Materials Research 254 : 195-198. ScholarBank@NUS Repository.
Abstract: Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications. © (2011) Trans Tech Publications, Switzerland.
Source Title: Advanced Materials Research
ISBN: 9783037851456
ISSN: 10226680
DOI: 10.4028/
Appears in Collections:Staff Publications

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